Elaboration and investigation of gas discharge equipment for electron impulse beam evaporation and ion-plasma deposition of nanostructurized coatings

Analyze of high voltage glow discharge with cold cathode and anode plasma, oriented to investi¬ga¬ti¬on the possibilities of using the high voltage glow discharge electron sources for elaboration the technological equipment for impulse electron beam evaporation and ion-plasma deposition of coatings have been provided. It is shown, that with using of triode type gas discharge electron sources with electric control of beam current by applying the additional discharges, obtaining of impulse electron beams with power density till 105 – 106 W/cm2 and full beam power range of tens kW is possible. In such conditions the frequency of beam modulation is in range 10 – 500 Hz and pulse duration is 1 – 50 ms.

Choosing of vacuum arc discharge for using in impulse ion-plasma coatings deposition, as technical simple and high effective to ionization of steam flow and operation gases, which are input in the volume of technological camera during electron beam evaporation is grounded.

Complex simulation of current-voltage and energetic characteristics of high voltage glow discharge electron gun, as well as self-maintained electron-ion optic of triode glow discharge electron guns, have been provided. Proposed model is based on analyze of interaction the fluids of charged particles in the discharge gap with taking into account the condition of discharge self-maintained. Theoretical results, have been obtained from proposed model, are confirmed the efficiency of using impulse triode high voltage glow discharge electron guns for deposition of coatings.

Particularities of elaboration of technological equipment, based on low pressure gas discharges, for impulse electron beam evaporation and ion-plasma deposition of coatings is analyzed.
As a result of fulfillment of this work gas discharge electron beam complex, included triode high voltage glow discharge electron gun, arc steam ionizer, system for control the pressure of operation gases, as well the system for control of energetic and time characteristic of electron beam, is elaborated. Using of this complex open the new possibilities for obtaining of high quality nanostructurized coatings.