пасивний МЕМС сенсор

Development of a wireless system for remote monitoring of the physical condition indicators of military and special forces personnel.

Development of a wireless system for remote monitoring of the physical condition indicators of military and special forces personnel.

The unified MEMS technology of production of sensors of acoustic waves is created, the additional technological equipment and equipment is developed. The main difference of the proposed technology is the unification of special techniques and technological modes of manufacturing the basic structure, sensitive and piezoelectric layers of different sensors.