Denbnovetskiy S.V.

Analyze of high voltage glow discharge with cold cathode and anode plasma, oriented to investi¬ga¬ti¬on the possibilities of using the high voltage glow discharge electron sources for elaboration the technological equipment for impulse electron beam evaporation and ion-plasma deposition of coatings have been provided.

 Obtaining of different coatings by electron-beam evaporation in vacuum is one of the most widely using methods. However, obtaining of coatings from multicomponent materials, as well as from chemical compounds, which are inclined to thermal dissociation, is really difficult with using of continuous heating during evaporation. For deposition of such coatings applying of pulsing evaporation by electron beam, generated in high voltage glow discharge with cold cathode, with activation of steam and gas fluxes in the evaporation zone by low-pressure discharge, is very perspective.