The use of slit high-frequency (HF) indirect cathode sources with indirect cooling of the target for the layer-by-layer deposition of the components on the substrate with their movement over the target surface is substantiated. Designs of sources for the deposition of ferroelectric film from zirconium-hafnium oxides and lead zirconate-titanate, focused on the use of targets with dimensions 68x30x5mm from powders of hafnium, zirconium, titanium, lead oxides, have been finalized.
An integrated system that will use modern information technology in solving technological preparation is developed. For its implementation at the system level, new approaches using information technology, consisting in the choice of new methods for modeling and optimization, which can most effectively solve any technological problem, reduce the time s technological preparation to improve its quality.
Given the nature of the process of hobbing developed a general theory of information technology software design hobs, which is the basis for creating a new level of CAD this tool. Creation of CAD based on it will allow the design stage hobs by determining the effect of process parameters and design parameters of gear milling tool accuracy and performance gear cutters to predict not only the accuracy of the wheels with less of their production, and to develop new and more progressive design hobs.